Changxin Memory Technologies, Inc.

Haihan Hung

Jingwen Lu

Bingyu Zhu

Wei Feng

Yin Kuei Yu

The present application relates to a capacitor device and a manufacturing method thereof, and a memory. forming a first capacitor structure on a substrate, includes: a first capacitor dielectric layer, a first upper electrode, a plurality of first lower electrodes arranged at intervals; the first capacitor dielectric layer at least covers sidewalls of the first lower electrodes, and the first upper electrode fills up gaps at an outer side of the first capacitor dielectric layer; forming a second capacitor structure on the first capacitor structure, the second capacitor structure includes a second capacitor dielectric layer, a second upper electrode, and a plurality of second lower electrodes arranged at intervals; the second lower electrodes are of a U-shaped structure, bottoms of the second lower electrodes are in contact with tops of the first lower electrodes, the second capacitor dielectric layer is at least located on surfaces of the second lower electrodes.

Capacitor structure and manufacturing method thereof, and memory

A semiconductor structure and a manufacturing method thereof are provided. The manufacturing method of the semiconductor structure includes: providing a substrate; forming on an upper surface of the substrate first patterns each including a first main body and a first flank wall covering a sidewall of the first main body; forming a filling layer which covers the first flank wall and fills a gap between adjacent first patterns; and etching a top of each of the first patterns to obtain second main bodies, second flank walls and protrusions located on upper surfaces of the second flank walls, the second flank wall covering a sidewall of the second main body, and a top of the protrusion being at least higher than a top of the second main body.

Semiconductor structure and manufacturing method thereof

A method of forming a semiconductor structure and the semiconductor structure are provided. The method includes the following operations. A semiconductor substrate is provided, in which a plurality of isolation grooves distributed at intervals are provided in the semiconductor substrate, and each of the isolation grooves includes a top region isolation groove and a bottom region isolation groove. A first protective layer covering the side wall of the top region isolation groove and the top of the semiconductor substrate is formed. Oxidation treatment is performed on the bottom region isolation groove to oxidize a part of the semiconductor substrate close to the bottom region isolation groove to form a second substrate isolation layer. A dielectric layer filling the isolation groove is formed. The first protective layer and the dielectric layer higher than the top of the semiconductor substrate are etched to form an isolation structure.

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Hefei, China

Haihan Hung