Guangdong University of Technology

Haidong Yang

Xin Chen

Jian Gao

Zhijun Yang

Youdun Bai

Meng Wang

Yun Chen

Dachuang Shi

Xindu Chen

Hui Tang

Zhengping Wang

Hanxiong Li

Yisheng Guan

A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.

Method of processing nano- and micro-pores

The present disclosure involves occasions where precise two-dimensional motion takes place, and is applicable to XY motion stages for precise displacement compensation. The present disclosure particularly involves a stiffness-frequency adjustable XY micromotion stage based on stress stiffening, which includes X-direction and Y-direction motion sub-stages and corresponding drivers and a micromotion working table. The micromotion stage uses membrane sets that have tension levels thereof adjusted by bolts as a flexible hinge, so as to achieve independent adjustment of the vibration frequency of the XY micromotion stage. The present disclosure implements the foregoing configuration based on prestressed membrane, so the frequency is adjustable. The inherent frequency of the micromotion stage can be adjusted before or during operation according to various working conditions and driving frequency. The two feed motion direction are perpendicular so as to prevent the micromotion working table from coupling during two-dimensional motion.

Stiffness-frequency adjustable XY micromotion stage based on stress stiffening

A common-stator macro/micro integrated precision motion one-dimensional linear motor assembly, includes a base, linear guide rails, slide blocks, a U-shaped linear motor stator, a macro motion rotor, a micro motion rotor and a macro/micro integrated platform. A macro and micro motion platforms are connected to form an integrated platform through an elastic member, an outer frame of the macro/micro integrated platform is mounted on the linear guide rails and the slide blocks, the U-shaped linear motor stator is arranged on the base, rotors are respectively mounted on the macro and micro motion platforms, and large-scale overall high-speed motion can be realized when macro and micro rotors are simultaneously driven, and when a motion deviation occurs, the micro motion platform realizes precise displacement output by virtue of elastic deformation due to small inertia and zero friction, and high-frequency motion deviation compensation can be realized by virtue of individual drive.

Common-stator macro/micro integrated precision motion one-dimensional linear motor assembly

The present disclosure relates to a macro-micro composite grating ruler measuring system based on conversion and amplification in vertical and horizontal directions. The macro-micro composite grating ruler includes a grating ruler, a macro-micro reading system moving with respect to the grating ruler, and a counting and image processing module. The macro-micro reading system faces grating strip datum and is parallel to the grating ruler. The system further includes a measuring reference line. The measuring reference line obtained by the image sensor together with grating strips forms an image overlap in the counting and image processing module. The measuring reference line and the grating strip jointly include an angle &#x3b8;. With the foregoing configuration, the present invention is compatible with the existing incremental grating rulers and absolute grating rulers, so is highly applicable.

Macro-micro composite grating ruler measuring system and measuring method using same comprising a macro-scale reading module, a micro-scale reading module and a measuring reference line

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Guangzhou, China

Haidong Yang