Samsung Electronics Co., Ltd.

Haeyong Choi

Sungmin Jang

Dong-Hee Kim

Taehyun Kim

Tae-Hyun Ko

Jiwoon Lee

Seongyun Ryu

Seongkeun Kang

Kyeongmin Baek

Byungku Yoo

An integrated waste gas treatment system includes an adsorption/desorption device that receives a waste gas that includes an organic compound and an organic nitrogen compound exhausted from a semiconductor manufacturing facility, where the adsorption/desorption device adsorbs the organic compound and the organic nitrogen compound and concentrates and desorbs the organic compound and the organic nitrogen compound, and a catalytic decomposition device disposed adjacent to the adsorption/desorption device, where the catalytic decomposition device includes a catalytic chamber that provides a gas passage through which a gas desorbed from the adsorption/desorption device flows and an oxidation-reduction catalyst disposed in the gas passage that removes the organic compound and the organic nitrogen compound from the desorbed gas. The organic compound and the organic nitrogen compound are subjected to an oxidation treatment by the oxidation-reduction catalyst, and nitrogen oxides generated by the oxidation treatment are removed by a selective reduction reaction.

Catalytic decomposition device and integrated waste gas treatment system

A desiccant replacing apparatus may include a supply-discharge member, a supply connection line connected to the supply-discharge member, an air conveyor coupled to the supply connection line, a discharge connection line connected to the supply-discharge member, and an air amplifier coupled to the discharge connection line. The supply-discharge member may include a housing providing an internal space, an injection line providing an injection path and penetrating the housing, an exhaust line providing an exhaust path connected to the internal space, and a filter in the internal space or the exhaust path. The supply connection line may be connected to the injection line, and the discharge connection line may be connected to the exhaust line.

Desiccant replacing apparatus and air dry system including the same

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Yongin-si, South Korea

Haeyong Choi