Samsung Display Co., Ltd.

Hae Sook Lee

Gyoo Wan Han

Je Kil Ryu

Emil Aslanov

Kyung Hoon Chung

Akifumi Sangu

Cheol Ho Park

Young Su Chae

Jin Hong Jeun

Young Geun Cho

A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.

Laser crystallization apparatus

An apparatus for manufacturing a display device includes a chamber, a laser module including a plurality of laser generators which respectively generates a plurality of raw laser beams using a solid material as a medium, a beam coupling module which combines the plurality of raw laser beams into a plurality of coupling beams, a beam mixing unit which converts the plurality of coupling beams into a plurality of mixing beams, a micro smoother which induces vibration movements of the plurality of mixing beams, an optical module which converts the plurality of mixing beams passed through the micro smoother into a final laser beam, and directs the final laser beam to the chamber, and a seal box disposed between the optical module and the chamber.

Apparatus for manufacturing display device

A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

Laser processing apparatus

A laser processing apparatus includes a laser beam generating unit which emits a laser beam, a lens unit which divides the laser beam into a plurality of laser beams, and a light condensing unit which condenses the plurality of laser beams. The lens unit includes a first lens array having a first central axis and a second lens array having a second central axis, and wherein at least one of the first lens array and the second lens array reciprocates such that the first central axis and the second central axis are deviated from each other.

Growing community of inventors

Hwaseong-si, South Korea

Hae Sook Lee