Average Co-Inventor Count = 10.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (3 from 132,083 patents)
2. Pukyong National University (1 from 100 patents)
3 patents:
1. 8790470 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
2. 8585917 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
3. 8084367 - Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods