Carl-zeiss-smt Ag

H A Van Mierlo

Hartmut Enkisch

Markus Weiss

Johann Trenkler

Fokko Pieter Wieringa

Marco Wedowski

Michiel David Nijkerk

Gisela Sipos

Nadyeh Shariloo, Legal Representative

Stephan Müllender

An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.

Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element

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Maassluis, Netherlands

H A Van Mierlo