Koninklijke Philips Corporation N.v.

Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Koninklijke Philips Electronics N.v.

Philips Intellectual Property & Standards Gmbh

Günther Hans Derra

Willi Neff

Jeroen Jonkers

Eric Gerardus Theodoor Bosch

Peter Zink

Rolf Theo Anton Apetz

Thomas Krücken

Oliver Rosier

A method of generating in particular EUV radiation () and/or soft X-ray radiation () emitted by a plasma () is described. The plasma () is formed by an operating gas () in a discharge space () which comprises at least one radiation emission window () and an electrode system with at least one anode () and at least one cathode (). This electrode system transmits electrical energy to the plasma () by means of charge carriers () introduced into the discharge space (). It is suggested for obtaining a reliable ignition of the plasma () at high repetition frequencies that a radiation () generated by at least one radiation source () is introduced into the discharge space () for making available the discharge carriers ().

Method and device for generating EUV radiation and/or soft X-ray radiation

The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate () is provided at least at the evaporation spot, the boiling point of said sacrificial suvstrate (38) during discharge operation lying below the melting point of the carrier material (), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate ().

Method and device for the generation of a plasma through electric discharge in a discharge space

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Aachen, Germany

Günther Hans Derra