Applied Materials Gmbh & Co Kg

Ald Vacuum Technologies Gmbh

Applied Materials, Inc.

Günter Klemm

Stefan Hein

Volker Hacker

Wolfgang Klein

Andreas Thiede

Hans-Jürgen Schneider

An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.

Arrangement for the regulation of the electron beam power of an electron gun

Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.

Method for removing particles from elements installed in a vacuum chamber

Growing community of inventors

Nidda, Germany

Günter Klemm