Samsung Electronics Co., Ltd.

Gyu-Chan Jeoung

Sung-Jin Kim

Gyu-hwan Kwag

Sun-Ho Kim

Sung-Wook Jung

Ki-Sang Kim

Jae-Chul Hwang

Jong-Geug Kim

Kyu-Chul Shim

Jin-Uk Park

Ji-Hoon Yeo

Shin-Sang Lee

An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

Apparatus and method of attaching pad on edge ring

A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a clean room by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the processing chambers. The multi-layers number 2 to 5, and the transfer path can be rectangular in shape and need only be slightly wider than the diameter of a wafer. The total width of the multi-chamber system is the sum of the width of one processing chamber plus the width of the transfer path.

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

Growing community of inventors

Hwaseong-si, South Korea

Gyu-Chan Jeoung