Samsung Display Co., Ltd.

Gyeong Hee Han

Seung Ho Myoung

Gyoo Wan Han

Toshinaru Suzuki

Sung Yong Lee

Tae Hun Kim

Do Hwan Kim

Jae Han Kim

Hee Sun Jang

Dae Young Oh

A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

Laser apparatus and laser machining method

The chuck for supporting a target substrate for a display device, the chuck includes: a base having a first surface to support an object and a second surface opposite the first surface, the first surface including a first area and a second area; and indentations formed in the second area and recessed from the first area in a thickness direction of the base. The indentations include a first indentation extending in a first direction and a second indentation extending in a second direction intersecting the first direction.

Electrostatic chuck, etching apparatus, and method of manufacturing display device

Growing community of inventors

Yongin-si, South Korea

Gyeong Hee Han