Industrial Technology Research Institute

Taiwan Semiconductor Manufacturing Comp. Ltd.

Gwo-Jou Huang

Horng-Kuang Fan

Tzong-Ming Wu

Chen-Shin Lin

Ton-Li Lee

Ping-Yu Hu

Jyh-Jone Lee

Chieh-Ling Hsiao

Jong-Yen Lin

Jyhjone Lee

A mechanically actuated airtight device for wafer carrier comprises a cover, at least one sealing gasket, at least one linked plate, and a driving wheel. The cover has a first face and a second face, and being formed with at least one hole therethrough. The sealing gasket is positioned above the hole of said cover, and has a base in a form of wedged ramp, where the base is further formed with a through opening. The linked plate has a first face and a second face, where the second face is at one side provided with a protuberance, and the first face is provided with at least one wedged ramp, and where the wedged ramp has a slope equal to that of the wedged ramp of the base, such that at least one of the wedged ramp of the first face of the linked plate mates with the wedged ramp of the second face of the linked plate. The driving wheel has a first face and a second face, where the first face is provided with a first guiding groove to allow the protuberance of the linked plate move along the first guiding groove. The invention is used as a chassis for a wafer carrier. Thus, when the wafer carrier is closed, it ensures a better airtight effect, and when the wafer carrier is opened so as to break the airtight, a pressure equalizing effect between the inside and outside of the wafer carrier is achieved enhancing removal of the casing of the wafer carrier quickly. Further, the level of the airtight can be adjusted as required.

Mechanically actuated air tight device for wafer carrier

An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.

Apparatus for automated loading of wafer cassette

A wafer cassette retainer to be used in a wafer container including a box top with an upper inner side for positioning a wafer cassette therein. The wafer cassette retainer comprises: a fixed part, mounted on the upper inner side of the box top; and an elastic part, attached to the fixed part from below. The elastic part has several elastic plates, which form a rhomboid, and a lower side with a contact arc for contacting the wafer cassette. The elastic part is elastic against vertical deformation and is deformed by contacting the wafer cassette within the wafer container, thus holding the wafer cassette securely, independent of size and shape thereof, and absorbing shocks thereon. For increased elasticity of the elastic part, additional grooves are cut into inner corners of two opposite lateral joints between the elastic plates.

Wafer cassette retainer in a wafer container

An apparatus for holding substrate includes a base housing. A plurality of pins are set on the top surface of the base housing. Further, the top surface has a plurality of openings through the top surface. The base housing has a first opening set on the bottom portion of one side of the base housing. Lift means is set in the base housing. A support member having an oblique surface structure is provided in the cylindrical housing and can upwardly pass through an opening formed on top of the cylindrical housing. A plate having a plurality of pins formed thereon is connected to the top of the support member. A substrate holder can be separated from the base housing, and the substrate holder includes a plate. A glass substrate is fixed on the plate by means of a plurality of fixers.

Apparatus for holding substrates

The present invention discloses a support mechanism for laterally supporting an article on a platform by utilizing a stabilizing means such that when a support plate is in an upright position to laterally support an article situated on the platform, the stabilizing means is placed in a relaxed state for stabilizing the upright position of the support member. The stabilizing means can be advantageously an extensible spring or a compressible spring to be used to modify an existing loading/unloading apparatus and to achieve the desirable benefits of the present invention method and apparatus.

Self-locking mechanism for a semiconductor wafer cassette support

Disclosed is an improved wafer retaining mechanism comprising a canopy, and more than one set of retaining mechanisms affixed to appropriate locations of the canopy, the retaining mechanism being operative in coordination with wafers received within a wafer cassette and a chassis for urging the wafers in place. The wafer retaining mechanisms each comprises a link unit including a sliding rod, a lower link, a front link, an upper link, and associated pins, wherein thc link unit is featured with openings at respective pivots to serve as engaging sections which, in response to proper external forces, engage or disengage components of the link unit from respective pins so as to facilitate assembly or disassembly of the link unit.

Wafer retaining mechanism

A latch mechanism for a wafer container includes a box sealable to a base plate to form an air-tight space for holding at least one wafer therein. The latch mechanism is located on the base plate and includes a U-shaped latch plate and a cam mechanism. The latch plate has a hook member at a front end thereof. The hook member includes a 7-shape hook with a bottom end pivotly engaged with the base plate and a top end pivotly engaged with the front end of the latch plate. The cam mechanism includes a cam and a linkage bar with a roller disposed therein. One end of the linkage bar attached to the latch plate. Another end of the linkage bar has a pin engaging with a slot formed in the cam. The pin and the roller form a positive and movable engagement with the cam. By turning the cam, the linkage bar and latch plate will have linear motion and trigger the hook to engage the box securely to the base plate or allow the box disengaging with the base plate. The cam has bulges on the circumference and are engageable with the roller for preventing the cam from counter rotating.

Latch mechanism for wafer container

Wafer pod

Disclosed is a wafer retaining mechanism comprising a box, and more than one link unit affixed to appropriate locations of the box, the link units being operative in coordination with a wafer cassette and a chassis for retaining securely the wafers received within the cassette. The links each comprises a sliding link, a lower link, a front link, an upper link, and associated pins.

Growing community of inventors

Hsinchu, Taiwan

Gwo-Jou Huang