Centre National De La Recherche Scientifique

Université De Franche Comte

Ecole Nationale Superieure De Mecanique Et Des Microtechniques

Centre National Detudes Spatiales

Gwenn Ulliac

Sylvain Ballandras

Blandine Edouard-Guichardaz

Emilie Courjon

Jean-Yves Rauch

Thomas Baron

Florent Bassignot

A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.

Volume wave resonators on micromachined vertical structures

A piezoelectric and ferroelectric bulk wave transducer operating at a predetermined frequency includes a block of substrate, having a first thickness and in a first material, and a piezoelectric and ferroelectric transduction plate, having a length, a width and a second thickness, and in a second piezoelectric material, first and second metal electrodes covering the plate in the direction of the length thereof. The plate has first and second ferroelectric domains with alternating polarizations, distributed along the length of the plate according to a periodic pattern of pitch. The plate is attached perpendicularly to the block so that the width of the plate and the first thickness of the block are the same direction. The first and second material, the first thickness of the block, the length, the width, the second thickness, the pitch of the plate are configured for generating and trapping bulk waves at the operating frequency of the transducer, guided between both electrodes.

Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure

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Besancon, France

Gwenn Ulliac