Samsung Led Co., Ltd.

Gwan Su Lee

Jong Ho Lee

Jin Ha Kim

Soo Jin Jung

Joong Kon Son

Moo Youn Park

Il Hyung Jung

Soo Ryong Hwang

A lens for a light emitting diode package and a light emitting diode package having the same have simple structures and increase light extraction efficiency by preventing light emitted from a light emitting diode chip from being internally reflected by a lens surface through a structural change in the lens surface.

Lens for light emitting diode package

A method of forming a fine pattern begins with providing a c-plane hexagonal semiconductor crystal. A mask having a predetermined pattern is formed on the semiconductor crystal. The semiconductor crystal is dry-etched by using the mask to form a first fine pattern on the semiconductor crystal. The semiconductor crystal including the first fine pattern is wet-etched to expand the first fine pattern in a horizontal direction to form a second fine pattern. The second fine pattern obtained in the wet-etching the semiconductor crystal has a bottom surface and a sidewall that have unique crystal planes, respectively. The present fine-pattern forming process can be advantageously applied to a semiconductor light emitting device, particularly, to a phonic crystal structure required to have fine patterns or a structure using a surface plasmon resonance principle.

Method of forming fine patterns and manufacturing semiconductor light emitting device using the same

Growing community of inventors

Gyunggi-do, South Korea

Gwan Su Lee