Samsung Electronics Co., Ltd.

Guyoung Cho

Sangjin Hyun

Donghyun Roh

Byung-Suk Jung

Subin Shin

Dae-Young Kwak

Koungmin Ryu

Shinhye Kim

Disclosed is a semiconductor device comprising a substrate, a plurality of active patterns that protrude from the substrate, a device isolation layer between the active patterns, and a passivation layer that covers a top surface of the device isolation layer and exposes upper portions of the active patterns. The device isolation layer includes a plurality of first isolation parts adjacent to facing sidewalls of the active patterns, and a second isolation part between the first isolation parts. A top surface of the second isolation part is located at a lower level than that of top surfaces of the first isolation parts.

Semiconductor device

A semiconductor device includes active patterns protruding from a substrate and an insulation structure surrounding lower portions of the active patterns. The insulation structure includes an insulation layer conforming to a top surface of the substrate and to sidewalls of the active patterns and a buried insulation pattern on the insulation layer.

Growing community of inventors

Seoul, South Korea

Guyoung Cho