Centre Suisse D'electronique Et De Microtechnique Sa

Dr. Johannes Heidenhain Gmbh

Guy Voirin

Olivier M Parriaux

Dieter Michel

Lucien G Falco

Victor Neuman

An optical device utilizing white light interferometry, having a Fabry-Perot interferometer incorporated in a reference branch of the optical device. The succession of interference products occurs from a combination of the light traveling through the transmission branch with the light traveling through the reference branch which has undergone 0 to N+1 reflections in the Fabry-Perot interferometer. The interference product gives a series of equally spaced absolute marks.

White light interferometric device adapted to define an absolute

An optical waveguide force meter for the measurement of forces or stresses integrated on a single substrate, including: a single-mode transducer waveguide supporting only the stresses which are applied through the intermediate portion of an upper plate of the force meter; a coupling/mixing grating having N focussing concave gratings provided adjacent an exit end of the optical waveguide; N detectors arranged at each of the N focussing points of waves defracted by the coupling/mixing grating; N TM polarization filters arranged respectively between each concave grating and each detector; and a single-mode laser source. The waveguide, coupling/mixing grating and polarization filters are all provided on the single substrate. The single-mode laser source and detectors are supported by the substrate and by an underlying base plate member.

Force meter with optical waveguide integrated in a substrate

Several photoelectric position measuring systems are described which utilize diffraction gratings to define the reference magnitude. Diffracted component beams are introduced by means of coupling-in gratings that have different grid constants from one another into optical waveguides to a coupler and there brought into interference. The interfering component beams are conducted from the outputs of the coupler via optical waveguides to detectors which transform them into electrical signals which are phase-shifted with respect to one another. Displacement of the diffraction grating is a measure for the position change to be measured of one machine component mounted for translation relative to another.

Growing community of inventors

Neuchatel, Switzerland

Guy Voirin