Guardian Europe S.a.r.l.

Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.a. (c.r.v.c.)

Guardian Industries Corporation

Guy Comans

Marcel Schloremberg

Philippe Uselding

Jean-Philippe Uselding

Gilbert Galan

Certain example embodiments relate to sputtering apparatuses that include a plurality of targets such that a first one or ones of target(s) may be used for sputtering in a first mode, while a second one or ones of target(s) may be used for sputtering in a second mode. Modes may be switched in certain example embodiments by rotating the position of the targets, e.g., such that one or more target(s) to be used protrude into the main chamber of the apparatus, while one or more target(s) to be unused are recessed into a body portion of a cathode of (e.g., integrally formed with) the sputtering apparatus. The targets may be cylindrical magnetic targets or planar targets. At least one target location also may be made to accommodate an ion beam source.

Sputtering apparatus including cathode with rotatable targets, and related methods

An endblock for a rotatable sputtering target, such as a rotatable magnetron sputtering target, is provided. A sputtering apparatus, including one or more such endblock(s), includes locating the electrical contact(s) (e.g., brush(es)) between the collector and rotor in the endblock(s) in an area under vacuum (as opposed to in an area at atmospheric pressure).

Endblock for rotatable target with electrical connection between collector and rotor at pressure less than atmospheric pressure

Growing community of inventors

Neufchateau, Belgium

Guy Comans