Huaqiao University

Guoqin Huang

Hui Huang

Xipeng Xu

Yangli Xu

Jing Lu

Peihui Luo

Zeling Yang

Ziqing Li

Jinquan Wei

Zhongwei Hu

Yuanqiang Tan

Changcai Cui

A method for measuring a thickness and optical constants of a multi-layer film comprises the following steps: 1: depositing films on a substrate to form a multi-layer film; 2: measuring an ellipsometric spectrum of the multi-layer film; 3: when the film layer of the multi-layer film is the diamond film, step 41 is executed; when the film layer of the multi-layer film is the diamond-like film, steps 42, 5, and 6 are executed; 41: obtaining optical constants and a thickness of the film layer of the multi-layer film; 42: selecting a spectral region defining a transparent section of the film layer of the multi-layer film, and obtaining optical constants and a thickness of the film layer of the multi-layer film; 5: adjusting an amplitude and a width of an oscillator model according to the ellipsometric spectrum; and 6: evaluating a difference between an experimental value and a fitted value.

Method for measuring thickness and optical properties of multi-layer film

A method of laser-curing and forming a honeycomb diamond grinding block made from fine-grained diamonds and a ceramic binding agent is provided. The method includes preparing a slurry, where components of the slurry, by mass ratios, include: 20-21 parts of photosensitive resin; 34.5-37 parts of aluminum-oxide powder; 4-5.5 parts of fine-grained diamond powder; 0.04-0.1 parts of a photoinitiator; a range of particle sizes of the fine-grained diamond powder is 6-8 μm; stirring the slurry to allow all components in the slurry to be fully mixed with each other to obtain a first printing material; feeding the first printing material into a light-curing printer to perform light-curing 3D printing to obtain a precursor of a finished product; and performing, by a high-temperature furnace, a degreasing operation and a high-temperature sintering treatment on the precursor to obtain the finished product of the honeycomb diamond grinding block.

Method of laser-curing and forming honeycomb grinding block made from fine-grained diamonds and ceramic binding agent

A manufacturing method of a diamond porous grinding block based on 3D printing. The manufacturing method includes designing a 3D printing model of a grinding block unit cell with an adjustable porosity according to an internal cooling space for abrasive debris required in a grinding process, importing the 3D printing model of the grinding block unit cell into a MAGICS software, filling a frame of a 3D printing model of a diamond porous grinding block with a plurality of 3D printing models of grinding block unit cells; preparing mixed powder of diamond abrasive particles and an aluminum alloy binder as printing powder, performing 3D printing to the 3D printing model of the diamond porous grinding block by an SLM technology to obtain the diamond porous grinding block. The diamond porous grinding block is configured to form a diamond structure grinding disc for grinding a semiconductor substrate.

Manufacturing method of diamond porous grinding block based on 3D printing and application thereof

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QUANZHOU, China

Guoqin Huang