Shanghai Yinguan Semiconductor Technology Co., Ltd.

Guoqi Zhang

Chunyuan Chen

Xiaohui Wu

Hanxiong Li

Chenyang Ding

The present invention discloses a displacement device based on Hall-effect sensors and planar motors. The device at least comprises a planar motor stator, a planar motor mover, and a Hall-effect sensor array, a magnet array on the planar motor stator extends on a first plane substantially parallel to a direction X and a direction Y to form a working area, a coil array on the planar motor mover is configured on a second plane parallel to the first plane, an interaction between the coil array and the magnet array causes the planar motor mover to produce a displacement of at least two degrees of freedom within the working area, the magnet array is configured by first magnet blocks and second magnet blocks alternately in rows and columns, the Hall-effect sensor array is composed of a plurality of Hall-effect sensors, and installed on the planar motor mover, a size of the magnet blocks of the magnet array in the direction X is not less than twice a column spacing of the Hall-effect sensor array, and the size of the magnet blocks of the magnet array in the direction Y is not less than twice a row spacing of the Hall-effect sensor array.

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Shanghai, China

Guoqi Zhang