University of Electronic Science and Technology of China

Guo Li

Hua Fan

Quanyuan Feng

Jing Luo

Panfeng Zhao

Huichao Yue

Yiming Hu

Disclosed is a three-axis Hall angle sensor with an accuracy of 0.3°. The sensor is mainly designed by means of finite element software and COMSOL Multiphysics. The present specification will be mainly performed in three steps. In the first step, a cross-shape horizontal Hall element for measuring the magnetic field in the vertical direction, that is, the direction z, is studied. The second section mainly studies a three-contact four-Hall vertical element for measuring the magnetic field in the directions x, y. The third part is to design the angle sensor. Compared with the horizontal Hall element, the vertical Hall element has a relatively large offset, therefore, four vertical Hall elements are used to measure the magnetic field in the horizontal direction, and two complementary vertical structures are used to eliminate the error when the magnetic field in the same horizontal direction is measured.

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Chengdu, China

Guo Li