Balzers Patent Und Beteiligungs Ag

Gunther Wulff

Josef Vogt

In an electron beam-generating system including an electron-emitting cathode, a beam focusing electrode, and an anode electrode for accelerating the emitted electrons, the magnetic fields for deflecting the beam to material to be heated and for periodically deflecting the focal spot of the beam on the material are produced by a heavy current conductor, that is, a conductor carrying a high current, arranged in proximity to the curved path of the deflected electron beam and extending perpendicular to the plane of deflection of the electron beam. The anode electrode may be formed with an opening for the passage of the electron beam, and the heavy current conductor is arranged in the proximity of the opening and parallel to the latter. The heavy current conductor may be designed as an edge of a slot-shaped opening, and may comprise a plurality of individual conductors.

Electron beam-generating system

An apparatus for electron-beam evaporation comprises a holding structure or support for the substance to be evaporated arranged alongside a hot cathode. A focusing and accelerating electrode is located adjacent the hot cathode and acts on the electrons emitted thereby. Means are provided for generating a magnetic field in the electron flow path in order to deviate the electrons to the substance. An ion-collecting electrode is located adjacent the hot cathode for collecting the ions formed in the vapor beam during the evaporation. The substance to be evaporated, the means for producing the electron beam and the ion-collecting electrode are all arranged in order one after the other in the magnetic field.

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Trubbach, Switzerland

Gunther Wulff