Carl Zeiss Multisem Gmbh

Gunther Scheunert

Dirk Zeidler

Gregor Dellemann

Christof Riedesel

Ingo Mueller

Arne Thoma

Nico Kaemmer

Michael Behnke

Nicole Rauwolf

A method for operating a multi-beam particle beam microscope includes: scanning a multiplicity of particle beams over an object; directing electron beams emanating from impingement locations of the particle beams at the object onto an electron converter; detecting first signals generated by impinging electrons in the electron converter via a plurality of detection elements of a first detection system during a first time period; detecting second signals generated by impinging electrons in the electron converter via a plurality of detection elements of a second detection system during a second time period; and assigning to the impingement locations the signals which were detected via the detection elements of the first detection system during the first time period, for example on the basis of the detection signals which were detected via the detection elements of the second detection system during the second time period.

Method for operating a multi-beam particle beam microscope

A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.

Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt

Growing community of inventors

Muenster, Germany

Gunther Scheunert