Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh

Gunther Lechner

Helmut Kirschner

Rudolf Griesshammer

Walter Kudlich

Hans Herrmann

Karl Pritscher

Kurt Berger

A stackable, tray-type packaging unit for semiconductor discs, having a lr portion accommodating the discs and a matching lid, comprising two upright, elongated side walls in the lower portion and two narrow end walls, all walls as well as the lid consisting of deep-drawn plastic material inert to the disc material. A plurality of ribs are formed opposite to each other on the side walls, serving as guide means for the discs during the loading of the unit, stabilizing ribs for accommodating the discs are provided in the base of the lower portion on the joining line between opposite guide ribs. The lower part of the side walls are curved inwardly at an angle of 30.degree. to 60.degree. with respect to the perpendicular upper part. Knobs notched centrally are provided as support points for the discs in the curved part of the side walls, two opposite knobs holding the discs upright after loading and during movement, said lid being designed to hold the discs at their outer periphery in two parallel rows of inwardly-directed retention cones formed in its base and to close the lower portion by means of a snap closure. The lower portion has upright legs projecting beyond the base, and the lid has cavities matching the shape of the legs for receiving them and forming thereby a stackable unit. A gas tight envelop bag may be used after loading for better protection of the discs.

Packaging unit for semiconductor discs

Process for making haze-free surfaces of semiconductor bodies which comprs a first step of polishing the surface by means of a polishing agent containing at least one member of the group consisting of quartz, silica, silicates and fluosilicates, and a second step of polishing the surface by means of a polishing agent containing in addition to the above defined agents from 0.1 to 10% by weight calculated on the polishing agent of a nitrogen-free surfactant selected from the group consisting of anionic and non-ionic surfactants, and a mixture thereof.

Nitrogen-free anionic and non-ionic surfactants in a process for

A stackable plastics pallet for packaging semiconductor discs on a gas-ti foil covering, said pallet having a plurality of circular depressions each for accommodating a semiconductor disc, and means for securing the discs between the pallets, the securing means being in the form of sloping part-sector shaped surfaces surrounding said depressions, with two opposite sets of sloping surfaces clamping the semiconductor discs at their outermost rims and immobilizing them thereby.

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Burghausen, Germany

Gunther Lechner