Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Gunther Hess

Holger Vogt

Andreas Gehner

Heinz Kuck

An illumination device used for the direct illumination of light-sensitive ayers comprises a light source and a pattern generator. The pattern generator includes an optical Schlieren system and an active, matrix-addressable surface light generator. The Schlieren system comprises a Schlieren lens and a projection lens as well as a mirror device, which is arranged between these lenses and which directs light coming from the light source onto the surface of the surface light modulator. A filter device is used for filtering out diffracted light and for permitting undiffracted light to pass from the surface light modulator to the projection lens. The structure to be illuminated is secured in position on a displaceable positioning table. The surface light modulator is addressed such that the non-addressed surface areas thereof correspond to the projection areas of said structure which are to be illuminated.

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Duisburg, Germany

Gunther Hess