U.S. Philips Corporation

Koninklijke Philips Corporation N.v.

Gunther Hans Derra

Hans G Ganser

Hanns Ernst Fischer

Holger Moench

Rob Snijkers

Hans-Peter Stormberg

Peter Zink

Hans-Gunther Ganser

Thomas V Kr&uuml;cken

Holger Monch

Hans Gunther Ganser

A debris mitigation system for use in a radiation unit for EUV radiation and/or X-rays, for example, includes a foil trap having several passages allowing a straight passage of radiation, and one or several feed pipes for gas supply of buffer gas to the foil trap. The foil trap has an interior space extending over several of the passages, where the feed pipes open into the interior space.

Debris mitigation system with improved gas distribution

A cleaning arrangement for an optical system and in particular for an optical system designed for EUV radiation. The cleaning arrangement has a gas inlet () for a reactive gas (). Contaminants () that have deposited on the surface of optical elements () are detached by the reactive gas. Also provided are getter surfaces () that are preferably arranged opposite the surfaces to be clean and by which the contaminants detached from these surfaces are absorbed. This absorption may take place as a result of condensation on the getter surface and also by chemical reaction.

Optical system having a cleaning arrangement

A circuit for operating a high pressure discharge lamp comprising input terminals for connection to a supply voltage source, output terminals for connecting the high pressure discharge lamp, and apparatus, coupled to the input terminals, for supplying an alternating lamp current to the high pressure discharge lamp. The lamp current in each period has a mean value Im. At the start of each period, the lamp current is lowered with respect to the mean value Im so as to allow for stable diffuse attachment on the cathodic phase electrode. The circuit is particularly suited for operating a lamp in an optical projection system.

Long life discharge lamp operating circuit with reduced lamp flicker

A circuit arrangement is provided for operating a high pressure discharge lamp with a lamp current which, in successive periods, has opposite polarities. The lamp is provided with at least two main electrodes being spaced an electrode distance from each other. The circuit arrangement includes input terminals for connection to a supply source, output terminals for connection to the high pressure discharge lamp, and an element, coupled to the input terminals, for supplying the lamp current to the high pressure discharge lamp, which current, in successive periods, has a predetermined shape. The circuit arrangement is provided with an element for detecting a first parameter indicative of the electrode distance and forming a first signal dependent on the first parameter and with an element for reshaping the lamp current, in successive periods, in dependence of the thus formed first signal.

Circuit arrangement for operating a high-pressure discharge lamp

A lens plate integrator includes first and second lens plates which transmit light from a light source on an optical path to a projection plane. Each lens plate includes corresponding first and second groups of lens elements; light from the first group of the second plate is focused on a projection face in the projection plane, while light from the second group of the second plate is focused in front of or behind the projection plane and only partially illuminates the projection face.

Optical projection devices including a lens plate integrator

The invention relates to a measuring circuit for detecting the amount of deposited electrode material on the wall of a lamp vessel of a discharge lamp by measuring the power of infrared radiation within a specific wavelength range, comprising a detector for generating an electrical signal constituting a measure for the power of the infrared light in said specific wave length range. According to the invention the measuring is done in a time lapse starting after a predetermined time interval following the extinguishing of the discharge lamp. An increased accuracy of the measurement is thereby realized.

Circuit arrangement for detecting the amount of deposited electrode

A circuit arrangement for operating a high pressure discharge lamp includes input terminals for connection to a supply voltage source and an apparatus coupled to the input terminals for supplying an alternating lamp current to the high pressure discharge lamp. A device (III) is provided for generating a current pulse in each half period of the lamp current. This current pulse has the same polarity as the lamp current and is superimposed on the lamp current in the latter part of a predetermined fraction of the half periods of the lamp current. The circuit substantially suppresses flickering of the discharge arc during lamp operation.

High pressure lamp operating circuit with suppression of lamp flicker

The invention relates to a dimming circuit arrangement for operating a high-pressure sodium lamp L with controllable color temperature. The lamp is supplied with current pulses having a controllable duty cycle D. A change in the color temperature can be achieved through a change .DELTA.D in the duty cycle D and a simultaneous change .DELTA.P in the power supplied to the lamp, while the relation .DELTA.D/.DELTA.P&gt;0 is satisfied.

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Aachen, Germany

Gunther Hans Derra