Leybold-heraeus Gmbh

Leybold Aktiengesellschaft

Leybold Vakuum Gmbh

Gunter Schutz

Hans-Peter Kabelitz

Christian Beyer

Hans-Peter Caspar

Ralf Steffens

Winfried Kaiser

Heinrich Engl&auml;nder

Markus Henry

Frank Fleischmann

Ralf Adamietz

Hans-Rudolf Fischer

Peter Reimer

Gerhard Wilhelm Walter

Friedrich Karl Von Schulz-Hausmann

Friedrich Schmaus

Dietrich Urban

Markus Szirmay

Hinrich Henning

Ludger Deters

The invention relates to a friction vacuum pump ( ) with a stator ( ) and a rotor ( ), which form at least two pump stages ( ) with one gas inlet ( ) each, as well as with junction for the pump stages, which are equipped with junction openings ( ) and serve for the connection of the gas inlets ( ) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings ( ) are located in a plane which is disposed laterally adjacent to the pump stages ( ) such that the distance between the junction openings ( ) and the rotor axis ( ) is of minimum feasible size.

Friction vacuum pump with a stator and a rotor

Friction vacuum pump with pump sections of different designs

Gas friction vacuum pump having a cooling system

A lubricating system for supplying oil to the bearings of a shaft having a central oil pumping passage open at one end. An oil delivery tube reaches into the oil pumping passage. To achieve a positive transfer of the oil from the oil delivery tube to the inner wall of the oil pumping passage, means are associated with the upper end of the oil delivery tube for bringing the oil onto the inner wall of the oil pumping passage.

Lubricating oil feed system

A device for moving a gas at a subatmospheric pressure with a screwthread-like device on at least one of the facing surfaces of a rotor spacedly surrounded axially by a relatively-rotatable stator insulates the stator from a housing for the device to prevent thermal variation of the space between the rotor and stator and, thus, keeping the gas-moving action constant.

Device for moving gas at subatmospheric pressure

The invention relates to a turbomolecular vacuum pump (1) with a rotor (6) and at least one antifriction bearing (17) for the rotor, the stationary ring (19) of the antifriction bearing being seated on the wall of a sleeve (21) which in turn is supported through at least two O-rings (26, 27) made from an elastic material on a casing section (13) of the pump. To improve the heat flow from the sleeve (21) to the casing (13) of the pump, the annular space (29) formed by two seal rings (26, 27), the sleeve (21) and the pump casing (13) is filled with a medium (31) promoting heat flow from the sleeve to the adjacent part of the casing.

Turbomolecular vacuum pump with a rotor and at least one antifriction

Growing community of inventors

Cologne, Germany

Gunter Schutz