Balzers Und Leybold Deutschland Holding Ag

Applied Materials Gmbh & Co Kg

Gunter Klemm

Wolfgang Achtner

Stefan Hein

Thomas Vogt

Detlef Eller

Wolfgang Klein

An expander roller for the wrinkle-free guidance of webs in closed chambers comprises two stationary supporting bodies () which are oriented with respect to one another at an obtuse angle in the proximity of a center plane (E&#x2014;E). On both sides of the center plane (E&#x2014;E) on the supporting bodies () are disposed roller sections () with surfaces in the form of truncated cones with shell lines (M, M) and which during their rotation pass through positions in which said shell lines (M, M) are aligned with one another. The surfaces () of the rollers are herein steplessly in line one with the other in succession and the rollers are supported via roller bearings in groups () on the two supporting bodies (). To reduce speed differences when taking off the webs, to avoid scratches on the webs and to improve the precision of guidance and smoothness of operation, the rollers on both sides of the center plane (E&#x2014;E) are each comprised of at least two roller sections () rotatable independently of one another. Before aerating the vacuum chamber, in the method for operation a gas is introduced into the bearing region through which solid bodies from the group dust and particles are blown out of the bearing region and solid bodies are prevented from penetrating into the bearing region.

Expander roller arrangement for the wrinkle-free guidance of webs

A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part (8) being provided with openings (12) for reducing cross sectional area where increased ohmic heating is desired, such as near the clamping points and between individual areas where wire is fed for melting in the trough.

Evaporator boat for an apparatus for coating substrates

An area of an insulating strip (3) which is to remain free of metal is covered by an endless cover strip (4), which rests on the insulating strip (3) and travels along with it at the same speed. Before it enters a vapor deposition zone (5), the cover strip is provided with a film of oil on the side facing the metal evaporator (6) and, after the cover strip (4) has passed through the vapor deposition zone (5) and after the cover strip (4) and the insulating strip (3) have been separated from each other, the oil which has been deposited from the vapor phase onto the cover strip (4) is removed by heating the cover strip (4) with a heater (7) installed in the immediate vicinity of the cover strip (4).

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Nidda, Germany

Gunter Klemm