Csmc Technologies Fab2 Co., Ltd.

Csmc Technologies Fab1 Co., Ltd.

Southeast University

Guipeng Sun

Huajun Jin

Guangtao Han

Shukun Qi

Feng Huang

Feng Lin

Bing Zhao

Huatang Lin

Longjie Zhao

Weifeng Sun

Sen Zhang

Shengli Lu

Siyang Liu

Dejin Wang

Chi Zhang

Shu Zhang

Kui Xiao

Jun Sun

Zhongyu Lin

Guangyang Wang

Jiaxing Wei

Guangsheng Zhang

Hongfeng Jin

Li Lu

Liangliang Ping

Fengying Chen

Lixiang Liu

A heterojunction semiconductor device with a low on-resistance includes a metal drain electrode, a substrate, and a buffer layer. A current blocking layer is arranged in the buffer layer, a gate structure is arranged on the buffer layer, and the gate structure comprises a metal gate electrode, GaN pillars and AlGaN layers, wherein a metal source electrode is arranged above the metal gate electrode; and the current blocking layer comprises multiple levels of current blocking layers, the centers of symmetry of the layers are collinear, and annular inner openings of the current blocking layers at all levels gradually become smaller from top to bottom. The AlGaN layers and the GaN pillars are distributed in a honeycomb above the buffer layer.

Heterojunction semiconductor device with low on-resistance

The present invention relates to an LDMOS device and a method of forming the device, in which a barrier layer includes n etch stop layers. Insulating layers are formed between adjacent etch stop layers. Since an interlayer dielectric layer and the insulating layers are both oxides that differ from the material of the etch stop layers, etching processes can be stopped at the n etch stop layers when they are proceeding in the oxides, thus forming n field plate holes terminating at the respective n etch stop layers. A lower end of the first field plate hole proximal to a gate structure is closest to a drift region, and a lower end of the n-th field plate hole proximal to a drain region is farthest from the drift region. With this arrangement, more uniform electric field strength can be obtained around front and rear ends of the drift region, resulting in an effectively improved electric field distribution throughout the drift region and thus in an increased breakdown voltage.

LDMOS device and method for preparation thereof

A semiconductor device comprises: a substrate; a well region provided in the substrate, having a second conductivity type; source regions having a first conductivity type; body tile regions having the second conductivity type, the source regions and the body tie regions being alternately arranged in a conductive channel width direction so as to form a first region extending along the conductive channel width direction, and a boundary where the edges of the source regions and the edges of the body tie regions are alternately arranged being formed on two sides of the first region; and a conductive auxiliary region having the first conductivity type, provided on at least one side of the first region, and directly contacting the boundary, a contact part comprising the edge of at least one source region on the boundary and the edge of at least one body tie region on the boundary.

Semiconductor device and manufacturing method therefor

A semiconductor device, and a manufacturing method thereof. The method includes: providing a semiconductor substrate provided with a body region, a gate dielectric layer, and a field oxide layer, formed on the semiconductor substrate; forming a gate polycrystalline, the gate polycrystalline covering the gate dielectric layer and the field oxide layer and exposing at least one portion of the field oxide layer; forming a drift region in the semiconductor substrate by ion implantation using a drift region masking layer as a mask, removing the exposed portion of the field oxide layer by further using the drift region masking layer as the mask to form a first field oxide self-aligned with the gate polycrystalline; forming a source region in the body region, and forming a drain region in the drift region; forming a second field oxide on the semiconductor substrate; and forming a second field plate on the second field oxide.

Semiconductor device, and manufacturing method thereof

Provided in the present invention are an LDMOS component, a manufacturing method therefor, and an electronic device, comprising: a semiconductor substrate (); a drift area () provided in the semiconductor substrate; a gate electrode structure () provided on a part of the surface of the semiconductor substrate and covers a part of the surface of the drift area; a source electrode () and a drain electrode () respectively provided in the semiconductor substrate on either side of the gate electrode structure, where the drain electrode is provided in the drift area and is separated from the gate electrode structure; a metal silicide barrier layer () covering the surface of at least a part of the semiconductor substrate between the gate electrode structure and the drain electrode; and a first contact hole () provided on the surface of at least a part of the metal silicide barrier layer.

LDMOS component, manufacturing method therefor, and electronic device

Disclosed is a method for manufacturing an isolation structure for LDMOS, the method comprising: forming a first groove on the surface of a wafer; filling the first groove with silicon oxide; removing part of the surface of the silicon oxide within the first groove by means of etching; forming a silicon oxide corner structure at the corner of the top of the first groove by means of thermal oxidation; depositing a nitrogen-containing compound on the surface of the wafer to cover the surface of the silicon oxide within the first groove and the surface of the silicon oxide corner structure; dry-etching the nitrogen-containing compound to remove the nitrogen-containing compound from the surface of the silicon oxide within the first groove, and thereby forming a nitrogen-containing compound side wall residue; with the nitrogen-containing compound side wall residue as a mask, continuing to etch downwards to form a second groove; forming a silicon oxide layer on the side wall and the bottom of the second groove; removing the nitrogen-containing compound side wall residue; and filling the first groove and the second groove with silicon oxide.

Method for manufacturing isolation structure for LDMOS

A method for manufacturing a semiconductor device, includes: forming a well region () in a semiconductor substrate () and forming a channel region () in the well region (), and forming a gate oxide layer () and a polysilicon layer () on the well region (); etching a portion of the gate oxide layer () and the polysilicon layer (), and exposing a first opening () used for forming a source region and a second opening () used for forming a drain region; forming a first dielectric layer () and a second dielectric layer () on the polysilicon layer () and in the first opening () and the second opening () successively, and forming a source region side wall at a side surface of the first opening () and forming a drain region side wall at a side surface of the second opening (); forming a dielectric oxide layer () on the polysilicon layer (), etching the dielectric oxide layer and retaining the dielectric oxide layer () located on the drain region side wall; removing the second dielectric layer () in the source region side wall and retaining the first dielectric layer () therein.

Semiconductor device and method for manufacturing same

A lateral diffused metal oxide semiconductor field effect transistor, comprising a substrate, a gate, a source, a drain, a body region, a field oxide region between the source and drain, and a first well region and second well region on the substrate. The second well region below the gate is provided with a plurality of gate doped regions, and a polycrystalline silicon gate of the gate is a multi-segment structure, each segment being separated from the others, with each gate doped region being disposed below the spaces between each segment of the polycrystalline silicon gate. Each of the gate doped regions is electrically connected to the segment that is in a direction nearest the source from among the two polycrystalline silicon gate segments on either side thereof.

Lateral diffused metal oxide semiconductor field effect transistor

An electrostatic protection device of an LDMOS silicon controlled structure comprises a P-type substrate (), an N-well () and a P-well () on the substrate, a gate electrode () overlapping on the P-well () and extending to an edge of the N-well (), a first N+ structure and a first P+ structure provided in the N-well (), and a second N+ structure and a second P+ structure provided in the P-well (), the first N+ structure being a drain electrode N+ structure (), the first N+ structure being a drain electrode N+ structure (), the first P+ structure being a drain electrode P+ structure (), the second N+ structure being a source electrode N+ structure (), the second P+ structure being a source P+ structure (), and a distance from the drain electrode P+ structure () to the gate electrode () being greater than a distance from the drain electrode N+ structure () to the gate electrode ().

Electrostatic protection device of LDMOS silicon controlled structure

Provided are a laterally diffused metal oxide semiconductor field-effect transistor and a manufacturing method therefor. The method comprises: providing a wafer on which a first N well (), a first P well () and a channel region shallow trench isolating structure () are formed; forming a high-temperature oxidation film on the surface of the wafer by deposition; photoetching and dryly etching the high-temperature oxidation film, and reserving a thin layer as an etching buffer layer; performing wet etching, removing the etching buffer layer in a region which is not covered by a photoresist, and forming a mini oxidation layer (); performing photoetching and ion injection to form a second N well () in the first N well and form a second P well () in the first P well; forming a polysilicon gate () and a gate oxide layer on the surface of the wafer; and photoetching and injecting N-type ions to form a drain electrode () and a source electrode ().

Laterally diffused metal oxide semiconductor field-effect transistor and manufacturing method therefor

A laterally diffused metal-oxide semiconductor field-effect transistor, comprising a substrate, a first conductivity type well region, a second conductivity type well region, a drain electrode in the first conductivity type well region, a source electrode and a body region in the second conductivity type well region, and a gate electrode arranged across surfaces of the first conductivity type well region and the second conductivity type well region, and also comprising a floating layer ring arranged on the top of the first conductivity type well region and located between the gate electrode and the drain electrode and a plurality of groove polysilicon electrodes running through the floating layer ring and stretching into the first conductivity type well region.

Laterally diffused metal-oxide semiconductor field-effect transistor

Provided is a laterally diffused metal-oxide-semiconductor field-effect transistor, comprising a substrate (), a source (), a drain (), a body region (), a P-type field-limiting ring (), and a well region on the substrate (); the well region comprises an inserted well (), which has P-type doping and is disposed below the drain and connected to the drain; N wells () disposed at the two sides of the inserted well (); a P well () disposed next to the N well () and connected to the N well (); a P-type field-limiting ring (), which is disposed inside the N well (), is a closed ring-shaped structure, and is located at the periphery below the drain (); the inserted well () extends in its longitudinal direction to the position where it is in contact with said P-type field-limiting ring (); the source () and the body region () are disposed inside the P well ().

Laterally diffused metal-oxide-semiconductor field-effect transistor

The present invention relates to a junction field effect transistor. The junction field effect transistor comprises a substrate (), a buried layer in the substrate, a first well region () and a second well region () that are on the buried layer, a source lead-out region (), a drain lead-out region (), and a first gate lead-out region () that are in the first well region (), and a second gate lead-out region () in the second well region (). A Schottky junction interface () is disposed on the surface of the first well region (). The Schottky junction interface () is located between the first gate lead-out region () and the drain lead-out region (), and is isolated from the first gate lead-out region () and the drain lead-out region () by means of isolation structures. The present invention also relates to a manufacturing method for a junction field effect transistor.

Junction field effect transistor and manufacturing method therefor

The present invention relates to a method for manufacturing a laterally insulated-gate bipolar transistor, comprising: providing a wafer having an N-type buried layer (), an STI (), and a first N well ()/a first P well () which are formed successively from above a substrate; depositing and forming a high-temperature oxide film on the first N well () of the wafer; performing thermal drive-in on the wafer and performing photoetching and etching on the high-temperature oxide film to form a mini oxide layer (); performing photoetching and ion implantation so as to form a second N well () inside the first N well () and second P wells () inside the first N well () and the first P well (); then successively forming a gate oxide layer and a polysilicon gate (), wherein one end of the gate oxide layer and the polysilicon gate () extends onto the second P well () inside the first N well (), and the other end extends onto the mini oxide layer () on the second N well (); and photoetching and injecting N-type ions between the mini oxide layer () and the STI () adjacent to the mini oxide layer () to form a drain electrode, and at the same time forming a source electrode () inside the second P well ().

Method for manufacturing laterally insulated-gate bipolar transistor

Provided is a manufacturing method for a laterally diffused metal oxide semiconductor device, comprising the following steps: growing an oxide layer on a substrate of a wafer (S); coating a photoresist on the surface of the wafer (S); performing photoetching by using a first photoetching mask, and exposing a first implantation window after development (S); performing ion implantation via the first implantation window to form a drift region in the substrate (S); coating one layer of photoresist on the surface of the wafer again after removing the photoresist (S); performing photoetching by using the photoetching mask of the oxide layer of the drift region (S); and etching the oxide layer to form the oxide layer of the drift region (S). Further provided is a laterally diffused metal oxide semiconductor device.

Growing community of inventors

Jiangsu, China

Guipeng Sun