Commissariat a L'energie Atomique Et Aux Energies Alternatives

Safran Electronics & Defense

Centre National De La Recherche Scientifique

Safran

Politecnico Di Milano

Université De Paris

Tronic's Microsystems

Universite Paris Cité

Guillaume Jourdan

Sébastien Hentz

Philippe Robert

Patrice Rey

Guillaume Lehee

Marc Sansa Perna

Laurent Duraffourg

Bernard Diem

Franck Badets

Loic Joet

Arnaud Walther

Yannick Deimerly

Julien Renard

Eric Colinet

Sebastien Hentz

Philippe Andreucci

Bertrand Delaet

Giacomo Langfelder

Loïc Joet

Nicolas Roch

Bruno Fain

Julien Arcamone

Ivan Favero

Dirk Ettelt

Loïc Sibeud

Carine Ladner

Christophe Poulain

Pierre Janioud

Alexandra Koumela

Houssein Elmi Dawale

Luca Leoncino

Fabrice-Roland Lamberti

Kazi Rafsanjani Amin

Francois-Xavier Boillot

Antonio F Longoni

Remi Laoubi

François-Xavier Boillot

Stefano Dellea

Rémi Laoubi

Marc Gely

A microsystem includes a substrate; a main part connected to the substrate via an anchor; a moving part configured to rotate about an axis of rotation O; a first beam connecting the moving part to the main part, the main direction of said first beam being along a first vector ehaving as origin the junction of the moving part with the first beam and in the sense of the main part; a second beam connecting the moving part to the main part, the main direction of the second beam being along a second vector ehaving as origin the junction of the moving part with the second beam and in the sense of the main part.

Microsystem for measuring rotational movement and measurement device therefor

A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.

Multisensor MEMS and/or NEMS measurement system

An electro-optical conversion system including an opto-mechanical conversion device which includes a ring cavity formed by an optical waveguide which extends along an annular closed curve, a micromechanical resonator that comprises at least one microbeam, and a zipper type element integrated into the ring cavity, the zipper type element including a first arm made on a portion of the ring waveguide and a second arm made on the microbeam. The conversion system also includes a capacitor with first and second electrodes separated by a gap which varies when the microbeam oscillates.

Electro-optical conversion system

An electromechanical conversion device includes a resonant electrical circuit comprising an inductance and a capacitor, the capacitor including at least a first electrode and a second electrode; and a mechanical oscillator including at least one microbeam formed in a membrane, the first and second electrodes being located side by side and the first electrode of the capacitor being located on a face of the microbeam so that the electrical capacitance of the capacitor varies when the mechanical oscillator oscillates; device wherein the inductance includes an electric track of very low thickness made on the membrane and made of a superconductive material chosen so as to obtain an electric track with a high kinetic inductance.

Electromechanical conversion device and system using such a device

A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current. A control circuit is configured to forward bias, during a time window of read-out of a disc of interest, the p-n junction of a disc of interest so as to place, via a thermo-optical effect, its resonant wavelength at a working wavelength, such that an optical signal propagating through the optical waveguide associated with the disc of interest is amplitude modulated.

Device and method for detecting chemical or biological species

A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis Xparallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis Xparallel to the excitation direction, and mounted with the ability to slide on the substrate along the second axis X.

Vibration-resistant gyrometer

Microelectronic structure comprising at least one movable mass that is mechanically connected to a first mechanical element by a first mechanically linking connector and to a second mechanical element () by electrically conductive second mechanically linking connector, and a device for electrically biasing the second mechanically linking connector, the second mechanically linking connector being such that they are the seat of a thermo-piezoresistive effect, the second linking connector and the movable mass being placed with respect to each other so that a movement of the movable mass applies a mechanical stress to the second linking connector, wherein the electrically biasing device are DC voltage biasing device and form, with at least the second mechanically linking connector, a thermo-piezoresistive feedback electric circuit.

Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect

A magnetic field gradient sensor includes a support and a structure having at least a first and a second mobile element, at least one magnetic sensor, each magnetic sensor being mechanically secured to one of the first and/or second mobile elements so as to be able to apply a mechanical force to the structure in the presence of a magnetic field gradient, a coupler for coupling between the first and second mobile elements so that the structure can be moved in at least one balanced mechanical mode in the presence of a magnetic field gradient, and a sensor for measuring the movement of the structure at least in balanced mode.

Magnetic field gradient sensor with reduced sensitivity to vibrations

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

Piezoresistive detection resonant device in particular with large vibration amplitude

The invention relates to a measurement device comprising a suspended semiconductor wire, a first control circuit designed to apply and/or read a first electrical signal between first and second ends of the suspended semiconductor wire and a second control circuit designed to apply and/or read a second electrical signal between first and second intermediate nodes of the suspended semiconductor wire.

Measurement device comprising a suspended semiconductor wire

A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.

Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams

An electrothermally actuated microelectromechanical and/or nanoelectromechanical structure including a stationary portion, at least one portion which is movable relative to the stationary portion, at least one electrothermal actuation beam which makes it possible to cause an electric current to flow from the stationary portion to the movable portion, is mechanically connected to the movable portion and is intended to move the movable portion relative to the stationary portion by electrothermal actuation, and at least one electrically conductive connection element electrically connecting the movable portion to the stationary portion, the actuation beam having a thickness of no greater than half one thickness of the movable portion and no greater than half one thickness of the connection element.

Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency

Microelectronic structure comprising a mobile mass mechanically linked to a first and to a second mechanical element by first and second mechanical linking device respectively, a polarisation source for the second mechanical linking device. The second mechanical linking means comprises two linking elements and a thermal reservoir placed between the linking elements, where at least one of the linking elements is made of piezoresistive material, where at least one of the first and second linking elements exhibit thermoelasticity properties. The thermal reservoir exhibits a thermal capacity which is different from those of the linking elements. The second linking device and the mobile mass are arranged relative to each other such that displacement of the mobile mass applies a mechanical stress to the second linking means.

Microelectronic structure comprising means of control of viscous damping

A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f=fm+&#x394;f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of &#x394;f.

Resonating measurement system using improved resolution

A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.

Method and apparatus to implement frequency stabilization of a resonator

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Grenoble, France

Guillaume Jourdan