Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

International Business Machines Corporation

Other

Guillaume Audoit

Tenko Yamashita

Nicolas J Loubet

Shay Reboh

Remi Coquand

Nicolas Bernier

Jorge Filevich

Laurens Franz Taemsz Kwakman

Agnieszka Priebe

Jean-Paul Barnes

Guillaume Delpy

Provided are embodiments for a semiconductor device. The semiconductor device includes a nanosheet stack comprising one or more layers, wherein the one or more layers are induced with strain from a modified sacrificial gate. The semiconductor device also includes one or more merged S/D regions formed on exposed portions of the nanosheet stack, wherein the one or more merged S/D regions fix the strain of the one or more layers, and a conductive gate formed over the nanosheet stack, wherein the conductive gate replaces a modified sacrificial gate without impacting the strain induced in the one or more layers. Also provided are embodiments for a method for creating stress in the channel of a nanosheet transistor.

Creation of stress in the channel of a nanosheet transistor

A method for characterizing a sample combining an X-ray tomography characterization technique and a secondary ionization mass spectrometry characterization technique, includes: a step of providing a tip that includes first and second end surfaces, a first cylindrical region bearing the first end surface and a second region in contact with the first cylindrical region and becoming slimmer towards the second end surface; a step of machining the second region to obtain a sample holder including a flat surface, the flat surface forming an end surface of the sample holder, the area of the flat surface being less than the area of the first end surface; a step of placing the sample on the flat surface of the sample holder; a first step of characterization of the sample using an X-ray characterization technique; a second step of characterization of the sample using a secondary ionization mass spectrometry characterization technique.

Method for characterizing a sample combining an X-ray characterization technique and a secondary ionization mass spectrometry characterization technique

Sample pillars for x-ray tomography or other tomography scanning are created using an innovative milling strategy on a Plasma-FIB. The strategies are provided in methods, systems, and program products executable to perform the strategies herein. The milling strategy creates an asymmetrical crater around a sample pillar, and provides a single cut cut-free process. Various embodiments may include tuning the ion dose as a function of pixel coordinates along with optimization of the beam scan and crater geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency. A novel cut-free milling pattern is provided with a crescent shape and optimized dwell-time values.

Tomography sample preparation systems and methods with improved speed, automation, and reliability

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Bourgoin Jallieu, France

Guillaume Audoit