Centre National De La Recherche Scientifique

Safran

Universitë De Bordeaux

Guillaume Aubert

Cyril Aymonier

Marjorie Christine Cavarroc

Baptiste Simon Giroire

Angélique Nadine Jeanne Poulon

Bertrand Guillaume

A device for depositing a thick metal nitride on a sample by supercritical fluids includes a first enclosure forming a first closed volume; a second enclosure placed in the first enclosure and delimited by internal walls transparent to electromagnetic radiation forming a second closed volume intended to comprise a fluid under supercritical conditions; a heat transfer dielectric fluid circulating in the first volume around the second enclosure; a sample holder present in the second volume; an induction heating device surrounding the second enclosure; inlets for introducing a fluid and at least one precursor material into the second enclosure; and an outlet to purge the second volume.

Device and method for depositing thick metal nitride coatings by the supercritical fluid route

A device for depositing a thick metal nitride on a sample by supercritical fluids includes a first enclosure forming a first closed volume; a second enclosure placed in the first enclosure and delimited by internal walls transparent to electromagnetic radiation forming a second closed volume intended to include fluid under supercritical conditions; a heat transfer dielectric fluid circulating in the first volume around the second enclosure; a sample holder present in the second volume; an induction heating device surrounding the second enclosure; inlets for introducing a fluid and at least one precursor material into the second enclosure, and an outlet to purge the second volume.

Growing community of inventors

TALENCE, France

Guillaume Aubert