Memc Electronic Materials, Inc.

Sic Processing Ag

Garbo S.r.l.

Sic Processing Gmbh

Garbo Servizi S.r.l.

Guido Fragiacomo

Carlo Zavattari

Elio Portaluppi

Process and apparatus for completely recovering the reusable components of an abrasive slurry used in slicing crystalline materials of silicon, quartz or ceramics when it becomes exhausted and enriched with undesired waste matter. The process consists of an initial centrifuge separation of the exhausted slurry as such and of a wet size-sorting treatment of the fraction containing the abrasive grains obtained from the centrifuge, carried out in a battery of hydrocyclones or centrifuges connected in series. The section for the recovery and purification of the abrasive grains comprises a multifunctional apparatus that performs all the required operations within a single pressure vessel.

Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components

A method of separating, recovering and reusing components of an exhausted slurry used in slicing silicon wafers from a silicon ingot. In the method, the solid particles and lubricating fluid of the exhausted slurry are separated without decreasing the viscosity of the exhausted slurry. The separated lubricating fluid may be collected and reused in the preparation of a fresh slurry. Additionally, the silicon particulate and metal slicing wire particulate are dissolved and separated from the abrasive grains. The abrasive grains are separated into spent abrasive grains and unspent abrasive grains. The separated unspent abrasive grains are suitable for reuse in the preparation of a fresh slurry.

Method for treating an exhausted glycol-based slurry

A method of separating, recovering and reusing components of an exhausted slurry used in slicing silicon wafers from a silicon ingot. In the method, the viscosity of the exhausted slurry is reduced and the lubricating fluid component of the slurry is separated from solids and collected, the collected lubricating fluid component being suitable for reuse in the preparation of a fresh slurry without any additional separation steps being necessary. Additionally, the separated solids may be collected and further separated into an unspent abrasive grain component, which is suitable for reused in the preparation of a fresh slurry, and a waste product containing silicon particulate and spent abrasive grains.

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Novara, Italy

Guido Fragiacomo