Infineon Technologies Austria Ag

Infineon Technologies Ag

Technische Universitaet Graz

Guenter Zieger

Bernhard Goller

Michael Sorger

Magdalena Forster

Katharina Schmut

Philemon Schweizer

Michael Sternad

Carsten Ahrens

Thomas Grille

Wolfgang Friza

Klaus Muemmler

Karl Mayer

Christian Krenn

Marco Koitz

Franz Kleinbichler

Guenther Zoth

A lithium battery includes a cathode, an anode integrally formed within a silicon substrate, wherein a surface portion of the silicon substrate is patterned to form a plurality of sub-structures, and an electrolyte.

Lithium battery, method for manufacturing a lithium battery, integrated circuit and method of manufacturing an integrated circuit

A lithium battery includes a cathode, an anode including a component made of silicon, a separator element disposed between the cathode and the anode, an electrolyte, and a substrate. The anode is disposed over the substrate or the anode is integrally formed with the substrate.

In various embodiments, a method of processing a contact pad may include providing a contact pad, a topmost layer of the contact pad containing aluminum or an aluminum alloy, at least part of the topmost layer of the contact pad being exposed; subjecting the contact pad to a thermally activated atmosphere containing water or reactive components of water.

Method of processing a contact pad

Embodiments show a method for fabricating a cavity structure, a semiconductor structure, a cavity structure for a semiconductor device and a semiconductor microphone fabricated by the same. In some embodiments the method for fabricating a cavity structure comprises providing a first layer, depositing a carbon layer on the first layer, covering at least partially the carbon layer with a second layer to define the cavity structure, removing by means of dry etching the carbon layer between the first and second layer so that the cavity structure is formed.

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

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Villach, Austria

Guenter Zieger