Mks Instruments, Inc.

Fes LLC

Guenter Sifnatsch

Uzi Josef Lev-Ami

Mark Attwood

Matthew Richter

Ron Hadar

Maxym Makhota

Nidal Khalil

A shift light system and method are described. The shift light system has an RGB illumination device that has configurable illumination states with one or more illumination states coupled to a processing unit wherein the one or more illumination states having one of a different color and a different color sequence that correspond to one or more states of the vehicle as indicated by the at least two vehicle generated signals.

Shift light system and method

An address-transparent device is disclosed that couples two networks in a semiconductor fab and communicates packets between a host on a first network and a tool on a second network. Optionally, the address-transparent device intercepts packets for local use by a data consumer that resides within or outside of the address-transparent device. The address-transparent device can intercept all or a portion of data streams. As another option, the address-transparent device reroutes packet to another destination by changing the header of the received packet.

Address-transparent device and method

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Controller and method to mediate data collection from smart sensors for fab applications

Failsafe switching of intelligent controller method and device

A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.

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Santa Clara, CA, United States of America

Guenter Sifnatsch