Epcos Ag

Rf360 Singapore Pte. Ltd.

Guenter Scheinbacher

Werner Ruile

Christoph Eggs

Gudrun Henn

Ingo Bleyl

Matthias Knapp

Benno Blaschke

Marc Konstantin Dietrich

Siegfried Menzel

Mario Spindler

An apparatus is disclosed for a surface-acoustic-wave filter with a compensation layer having multiple densities. In an example aspect, the apparatus includes at least one surface-acoustic-wave filter with a piezoelectric layer, a substrate layer, and a compensation layer positioned between the piezoelectric layer and the substrate layer. The compensation layer includes a first portion having a first density and a second portion having a second density. The second density is greater than the first density. The first portion is positioned closer to the piezoelectric layer as compared to the second portion. The second portion is positioned closer to the substrate layer as compared to the first portion.

Surface-acoustic-wave (SAW) filter with a compensation layer having multiple densities

The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.

Method of producing a microacoustic component

Growing community of inventors

Baldham, Germany

Guenter Scheinbacher