International Business Machines Corporation

Guenter Schaefer

Wayne A Barringer

James E Boyette, Jr

Apparatus for contact exposing each side of a substrate to a different image on a mask includes a first-side imaging station for imaging the first side of the substrate, a second-side imaging station for imaging the second side thereof, an intermediate station between the imaging stations for inverting the substrate. In each imaging station, the substrate is moved longitudinally with a transport carriage, from which it is transferred to an imaging carriage to be driven to an imaging point at which illumination through the mask occurs. The imaging carriage moves in both longitudinal and transverse directions, providing for both exposure to a mask covering the substrate and for step-and-repeat exposure of multiple portions of the substrate to a smaller image. Before exposure, the top surface of the substrate is aligned to be parallel to the adjacent mask, fiducial markings in the substrate are aligned with fiducial markings on the mask, and air is evacuated from the area between the mask and the substrate.

System for contact imaging both sides of a substrate

A test system for applying electrical tests to circuits on flexible substrates includes a first transport system moving frames, each of which is configured for holding a single such flexible substrate, a loading station in which the substrates are individually loaded onto the frames, a testing station in which the electrical tests are applied, and an unloading station in which the substrates are removed from the frames. Within the testing station, each frame is disengaged from the first transport system and fastened to a second transport system, which moves the frame in a pattern causing a number of segments of the substrate within the frame to be placed between probe arrays adjacent each of the opposite sides of the substrate. These arrays are each aligned with visual markings on the adjacent side of the substrate, and the arrays are then moved into engagement with the substrate for the testing process. When testing of a particular substrate is complete, the frame is disengaged from the second transport system and fastened to the first transport system to be carried to the unloading station.

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Fort Lauderdale, FL, United States of America

Guenter Schaefer