Carl Zeiss Industrielle Messtechnik Gmbh

Cymer, Inc.

Guenter Grupp

Otto Ruck

Eugen Aubele

Ralf Bernhardt

Klaus Bendzulla

Palash P Das

Thomas Hofmann

Rainer Sagemueller

Kurt Brenner

Roland Roth

Peter Uhl

Ulrich Staaden

Berthold Matzkovits

Thomas Maier

Berndt Kammleiter

Jochen Burger

Werner Leitenberger

Rudolf Kern

Ernst Stumpp

Joerg Walther

Henning Schon

Gerd Moser

Friedrich Schoerg

Carsten Wuerfel

Oliver Jacobs

Otto Boucky

Ernst Stump

Michael Hoell

Kai Schaeffauer

The invention relates to a method for checking an electrical value of an electric machine, in particular an electric machine of a coordinate measuring device. The electric machine has an electric drive comprising a stator and a rotor. The method includes the steps of: detecting a value of a drive current delivered to the electric drive for driving the rotor, detecting a measured value of an electrical input variable of the electric machine, determining a calculated value of the electrical input variable on the basis of the detected value of the drive current and on the basis of a performance model of the electric machine, and determining a comparison value on the basis of the detected measured value and the calculated value of the electrical input variable, in order to check the detected value of the drive current.

Method and device for checking an electrical value of an electric machine

A method and an arrangement for capturing an object by a movable sensor are provided. The method includes moving the sensor relative to the object and repeatedly ascertaining an instantaneous position of the sensor by a position measurement system, outputting the position to an evaluation device at a predetermined time point, repeatedly capturing the object by the sensor during a capturing time interval and outputting a measurement signal corresponding to the information captured during the capturing time interval. For at least one capturing time interval, a point in time of the capturing of the object is determined which lies within the capturing time interval, position values are ascertained and outputted at points in time which include the point in time of the capturing, and a position main value is ascertained based on the position values which approximates the position of the sensor at the point in time of the capturing.

Method and arrangement for capturing an object using a movable sensor

The present invention relates to a method for single-point probing of a workpiece by means of a sensor, in particular a tactile sensor, of a coordinate measuring machine, comprising the steps of providing a variable at least indirectly representing a required accuracy of the single-point probing, providing a parameter data set, wherein the parameter data set has prescriptions for regulating and/or evaluating the single-point probing with the required accuracy, and carrying out the single-point probing of the workpiece, wherein the coordinate measuring machine is regulated on the basis of the provided parameter data set and/or an evaluation is carried out on the basis of the provided parameter data set. Furthermore, a coordinate measuring machine for single-point probing of a workpiece is proposed.

Method for single-point scanning of a workpiece and coordinate measuring machine

The present invention relates to a coordinate measuring machine with a measuring system for measuring a workpiece, a carrier structure for carrying the measuring system and a base plate for supporting the workpiece. The carrier structure is movably guided in at least one direction on the base plate. The coordinate measuring machine also has a first support system with at least three supports for supporting the base plate, a second support system and a control device for controlling the second support system dependent on a force application to the first support system. The present invention also relates to a method for compensating for large workpiece masses on a coordinate measuring machine.

Coordinate measuring machine and method for compensating for large workpiece masses

A coordinate measuring machine including a workpiece support for mounting a workpiece to be measured; a mechanism for moving a sensor in a first coordinate direction and a second coordinate direction perpendicular thereto. The mechanism includes: a first measurement slide guided in the first coordinate direction along two parallel guides arranged on opposite sides of the workpiece support. The first measurement slide spans the support. The first slide is driven via a first drive, which drives the first slide along a first guide of the guides, and is driven via a second drive, which drives the first slide along the second of the guides; a second measurement slide guided movably in the second coordinate direction along the first measurement slide. The second slide is assigned a position measuring system, via which the position of the second measurement slide relative to the first measurement slide can be determined; a controller, which actuates the first and second drive. The controller includes a force feedforward control, which, depending on the detected position (x) of the second measurement slide and depending on a setpoint acceleration (a) to be set of the first measurement slide, brings about an actuation of the first drive and/or of the second drive in such a way that the torques which as a result of the acceleration of the first measurement slide by the first drive and by the second drive relative to a rotation axis (R) which is perpendicular to the first and second coordinate directions at least partly or completely compensate for one another.

Coordinate measuring machine and method for operating a coordinate measuring machine

A method for ascertaining a correction value for monitoring a fluid bearing of a coordinate measuring machine or other machine tool. Also disclosed is a coordinate measuring machine having at least one fluid bearing. The machine further includes a first element and a second element which are supported against each other by means of at least one fluid bearing. In addition, a control device is provided for controlling the machine. A quantity representing a pressure in the at least one fluid bearing is ascertained as a function of a position and/or orientation of the first element relative to the second element. A correction value for a pressure in the at least one fluid bearing is determined for the position and/or orientation of the first element relative to the second element. The correction value is then stored in the control device, and subsequently used for machining or measuring a workpiece.

Method for determining a correction value for the monitoring of a fluid bearing and machine having at least one fluid bearing

A method for operating a coordinate measuring machine or a machine tool. A movement of a machining part is controlled in such a way that, during the movement of the machine part, a predetermined maximum acceleration and/or a predetermined maximum jerk is not exceeded. The maximum acceleration and/or the maximum jerk is varied depending on the position of the machine part and/or depending on the alignment of the machine part.

Operation of a coordinate measuring machine

A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit. It is particularly preferred if the current number of position pulses and the defined number of pulses are compared in a comparator which is arranged on an interface card of a computer unit, with the drive control circuit for controlling the movement of the machine part being implemented with a closed loop controller in the form of a controller program, which is cyclically executed by a central processor of the computer unit.

Method and apparatus for position-accurate triggering of a machine part

A machine, such as a coordinate measuring machine, uses a material measure with a periodic division in order to determine spatial positions of a working or measuring head. The periodic division of the material measure is further subdivided by interpolation values. For the purpose of correcting interpolation errors, the head is moved to a plurality of positions and a plurality of position data is determined. The plurality of position data represents a position curve of the head. A periodic component in the position curve is determined, which periodic component corresponds approximately to the periodic division of the material measure. Correction values are determined and the interpolation values are corrected using the correction values such that the periodic component is substantially reduced or largely eliminated.

Correction of interpolation errors of a machine, such as a coordinate measuring machine

A probe head having a probe head base and a stylus is provided for contacting a surface point on a workpiece. The stylus is moveable relative to the probe head base and has a defined rest position relative to the probe head base. For the contacting, the probe head is moved relative to the workpiece until the stylus touches the surface point with a defined contacting force. A correction data record representing a hysteresis behavior of the stylus with respect to the rest position is provided, and the contacting force is determined using the correction data record.

Method and device for contacting a surface point on a workpiece

In order to determine spatial coordinates of a multiplicity of measurement points along a contour of a measurement object, a probe head is provided with a probe element that is movably supported on the probe head. During movement of the probe head along the contour, position measuring values of the probe head and deflections of the probe element relative to the probe head are determined. Spatial coordinates for the measurement points along the contour are determined from the position measuring values and deflections. The probe element is kept in contact with the contour during movement of the probe head by using an actuator to produce a defined contact force. The contact force is set as a function of a differential acceleration of the probe element relative to the probe head.

Method and apparatus for determining spatial coordinates at a multiplicity of measurement points

In a coordinate measuring machine or any other kind of machine having at least one translational movement axis, correction values are determined by moving the mobile head of the machine along a defined path of movement. First and second position data are recorded by means of first and second position measuring devices. The first position data originate from position measuring devices of the machine. The second position data result from a reference measurement. The correction values are determined as a function of the first and second position data. A defined number of correction values is determined for each section of the path of movement, with the defined number varying in the sections as a function of the error profile defined by the correction values.

Method for determining correction values for correcting positional measurement errors in a machine having at least one translational axis of movement

A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing is provided and subtracted from the actual difference, in order to obtain a dynamic difference value representing a static difference between the first and the second displacement positions is subtracted from the actual difference value in order to obtain a dynamic difference value. The space coordinate of the measurement point is determined as a function of the dynamic difference value.

Method and machine for determining a space coordinate of a measurement point on a measurement object

For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

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Boehmenkirch, Germany

Guenter Grupp