Asml Netherlands B.v.

Gudrun Ghilaine Agnes De Gersem

Jeroen Van Duivenbode

Roger Franciscus Mattheus Maria Hamelinck

The invention provides a magnet assembly for a planar electromagnetic motor, the magnet assembly comprising: —a first plurality of superconductive (SC) coils, inside an outer circumference and arranged in a planar pattern such as a rectangular pattern, —a second plurality of SC coils, arranged along an outer boundary of the planar pattern, a coil of the first plurality of SC coils having a first in-plane shape and a coil of the second plurality of SC coils having a second in-plane shape, different from the first in-plane shape, wherein the second plurality of SC coils is arranged at least partly inside the outer circumference.

Magnet assembly, coil assembly, planar motor, positioning device and lithographic apparatus

The invention relates to a lithographic apparatus comprising: an actuation system for positioning an object; a control unit (CU) for controlling the actuation system; and a cooling system for cooling the actuation system, wherein the actuation system comprises a coil assembly (CA) including one or more coils (CO) as force generating members, wherein the cooling system comprises cooling element (CE) interacting with the coil assembly for cooling the coil assembly, and wherein the control unit is configured to control a temperature of the one or more coils to keep a magnitude of cyclic stress below a predetermined value.

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Veldhoven, Netherlands

Gudrun Ghilaine Agnes De Gersem