Boe Technology Group Co., Ltd.

Hefei Boe Optoelectronics Technology Co., Ltd.

Hefei Boe Display Technology Co., Ltd.

Guanjie Cheng

Wenjun Zhang

Xunze Zhang

Sangsoo Park

Xiaokun Wang

Hualu Wang

Qingliang Wen

Yuanhu Li

Zhaobo Wang

Lei Sha

Ruifeng Mao

Leilei Lv

Sangkee Kim

The present disclosure provides a vacuum heating device including: a vacuum chamber; a plurality of heating units each provided in the vacuum chamber to heat a tray; and a nitrogen gas generator unit configured to be in fluid communication with the vacuum chamber.

Vacuum heating device

It is provided a magnetron-sputtering coating system including a sputtering chamber. The sputtering chamber therein includes: a set of target, formed by concatenating a plurality pieces of target; a substrate carrier, arranged to be opposite to the target set, and support a substrate to be coated with a film; and a driving device, arranged to drive the substrate carrier to reciprocate in a direction of the arrangement of the target.

Magnetron-sputtering coating system and method, and display substrate

Growing community of inventors

Beijing, China

Guanjie Cheng