Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (2 from 993 patents)
2 patents:
1. 7195548 - Method and apparatus for post-CMP cleaning of a semiconductor work piece
2. 7182673 - Method and apparatus for post-CMP cleaning of a semiconductor work piece