Applied Materials, Inc.

Guangchi Xuan

Song-Moon Suh

Yuanhong Guo

Pulkit Agarwal

Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO) particles. A method includes flowing liquid COinto a spray nozzle, and directing a first stream of solid COparticles from the spray nozzle toward a ceramic article for a first time duration to clean the ceramic article. The liquid COis converted into the first stream of solid COparticles upon exiting the spray nozzle. The first stream of solid COparticles causes a layer of solid COto be formed on the ceramic article. After the layer of solid COhas sublimated, a second stream of solid COparticles is directed from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article.

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Sunnyvale, CA, United States of America

Guangchi Xuan