Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (2 from 278 patents)
2. Beijing E-Town Semiconductor Technology, Co., Ltd (1 from 116 patents)
2 patents:
1. 11094528 - Surface treatment of substrates using passivation layers
2. 10217626 - Surface treatment of substrates using passivation layers