Other

Globalfoundries Inc.

Greogory P Prokopowicz

James F Cameron

John Paul Amara

Jin Wuk Sung

David A Valeri

Wu-Song S Huang

Pushkara Rao Varanasi

Wenjie Li

Libor Vyklicky

Irene Popova

Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.

Coating compositions suitable for use with an overcoated photoresist

Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.

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Worcester, MA, United States of America

Greogory P Prokopowicz