Aura Systems Inc.

Daewoo Electronics Co., Ltd.

Gregory Um

Andrei Szilagyi

Yeon H Lee

Jeong B Ji

A thin film actuated mirror is disclosed having a substrate, a deformable structure mounted to the substrate, and a mirror surface interconnected to the deformable structure such that the mirror surface tilts in response to the deformation of the deformable material layer. The deformation occurs due to the effective strain gradient across the monomorph thickness which is accomplished by varying the electric field across the thickness or the strain parameter across the thickness. The deformable structure includes an active material layer fabricated from a semi-conductive ferroelectric ceramic material and two metal electrodes, each of the electrodes being mounted on opposing surfaces of the active material layer, wherein an electrical signal applied across the active material layer between the electrodes causes deformation of the active material layer. Alternatively, the active material layer may be fabricated from two layers, an upper layer of an active piezoelectric material and a lower layer of an inactive material.

Monomorph thin film actuated mirror array

A thin film actuated mirror for an actuated mirror array includes a pedestal, a piezoelectric structure mounted to the pedestal, and a mirror surface interconnected to the piezoelectric structure such that the mirror surface tilts in response to the deformation of the piezoelectric material layer. The pedestal includes a first pedestal section and a second pedestal section, and the piezoelectric structure is divided into a first portion and a second portion. The piezoelectric structure includes a piezoelectric material layer having two opposing surfaces, and two metal electrodes, the electrodes being mounted on opposing surfaces of the piezoelectric material. The piezoelectric structure first portion is mounted to the first pedestal section at a proximal end of the piezoelectric structure and the second portion is mounted to the second pedestal section at a distal end of the piezoelectric structure.

Thin film actuated mirror array for providing double tilt angle

An actuator for tilting the plane of an object includes a substrate and a pair of piezoelectric material members. Each of the piezoelectric members has a top surface, a bottom surface, a first side surface and a second side surface. The bottom surface is mounted to the substrate, and the first side surfaces of each of the members are affixed to each other and electrically connected in common. One of the piezoelectric material members further has a polarization selected so that a voltage applied between the first side surface and the second side surface thereof causes the piezoelectric material member to either contract or expand between the top surface and said bottom surface, depending on the polarity of the voltage. The object is mounted to the top surface of each of the piezoelectric material members so that when a voltage is applied to one of the piezoelectric material members, the object either tilts toward or away from that member, depending on the polarity of the voltage.

Piezoelectric actuator

A thin film actuated mirror for an actuated mirror array includes a pedestal and at least piezoelectric structure cantilevered from the pedestal. The piezoelectric structure includes a layer of piezoelectric material having two opposing surfaces. Each of two metal electrodes are mounted on a respective one of the opposing surfaces of the piezoelectric material layer. An electrical signal is applied across the piezoelectric material, between the electrodes, causing deformation of the piezoelectric material. The thin film actuated mirror further includes a mirror surface interconnected to the piezoelectric material layer such that the mirror surface deforms in response to the deformation of the piezoelectric material layer.

Thin film actuated mirror array

An apparatus to modulate the intensity of a pixel displayed on a screen focused optical energy from a broadband source onto a reflective first face of a planar member. The first face is disposed in said first propagation path at a selected angle thereto to direct optical energy along a second propagation path. A planar mirror is disposed in the second propagation path. The plane of the mirror is actuatable to orientate the mirror within a range of angles to said second propagation path between a first angle limit and a second angle limit. A second focusing lens disposed in the second propagation path to focus optical energy reflected from the first face onto the mirror. The mirror when at the first angle limit reflects optical energy along the second propagation path to the first face and when at the second angle limit reflects optical energy along a third propagation path adjacent an edge of the planar member and external thereto so that flux of optical energy along the third propagation path is a function of the present orientation of the mirror between the first angle limit and the second angle limit. The screen is disposed in the third propagation path wherein the flux of optical energy along the third propagation path when focused on the screen determines the intensity of the pixel.

Pixel intensity modulator

Optical energy from a broadband source is focused on an aperture in an opaque member. The energy exiting the aperture is received off axis by a parabolic mirror which collimates the energy. The collimated energy is reflected from each planar mirror of an actuated mirror array. The reflected energy from the mirror array is re-reflected to the aperture by the parabolic mirror. The orientation of each planar mirror determines the flux which passes through the aperture or is reflected by a reflective face of the opaque member. The energy reflected from this face which is derived from each mirror corresponds to the flux intensity for a corresponding pixel. This energy may then be focused on a screen to display the scene.

Scene projector

A television display apparatus wherein a white light source emits 9a beam onto a plurality of dichroic mirrors which split the beam into three beams of the primary colors, then reflects the three primary beams onto three deformable reflective surfaces, which again reflect the beams through slits in a non-reflective surface, thereby modulating the intensity of the beams. The amount of light passing through the slits is horizontally scanned by one surface of a rotating polygonal mirror, then passes through collimating and projection lenses and onto a screen.

Actuated mirror optical intensity modulation

An actuator for tilting the plane of an object is constructed from a stack of piezoelectric or electrostrictive members. First alternate interstices between the members are filled with a first conductive material, except that a first gap remains between the material and one side of the stack. Similarly, second alternate interstices between the members are filled with a second conductive material, except that a second gap remains between the material and an opposite side of the stack. The first gap and the second gap have unequal depth into the stack. The first material in the first interstices is coupled in common and the second material in the second interstices is coupled in common. A voltage applied between the first material and the second material will thereby cause the stack to bend, thereby tilting the plane of the op of the stack.

Piezoelectric and electrostrictive actuators

A piezoelectric actuator includes a pair of piezoelectric members which are oriented to shear laterally toward each other in the presence of an applied voltage. A hinge having translational members (which act similarly to a rack) and a rotating member (which acts similarly to a pinion) is attached to the top of the piezoelectric members with one translational attached to a respective one of the piezoelectric members. A driven member attached radially outward from the rotating member will then move through an arc when the piezoelectric members laterally shear. An object, such as a mirror, when carried by the distal end of the driven member, will then be actuated.

A television display apparatus wherein a white light source emits a beam onto a plurality of dichroic mirrors which split the beam into three beams of the primary colors, then reflects the three primary beams onto three deformable reflective surfaces, which again reflect the beams through slits in a non-reflective surface, thereby modulating the intensity of the beams. The amount of light passing through the slits is horizontally scanned by one surface of a rotating polygonal mirror, then passes through collimating and projection lenses and onto a screen.

A method for fabricating an array of mirrors for an optical projection system. This method comprises the steps of forming an array of holes between a top surface and a bottom surface on an electrically insulated substrate. These holes are then filled with an electrically conductive material. Another step in this method includes mounting a plurality of piezoelectric pedestals on the top surface of the substrate wherein each of the pedestals are disposed over a respective hole so that the first face of each of the pedestals is electrically connected to the conductive material in the respective holes. A plurality of mirrors are then mounted on the pedestals wherein each of the mirrors is disposed on at least one of the pedestals. After the mirrors are mounted the second face of each pedestal is electrically connected to a common circuit node.

Method for fabricating mirror array for optical projection system

A video display system includes a source of optical energy, a beam splitter, a baffle, an MxN array of mirrors and a screen. The source develops the first light beam along a first propagation path. The beam splitter is disposed in this first propagation path. The beam splitter is positioned to split the optical energy of the first light beam to develop a second light beam along a second propagation path. The baffle has a first face, a second face and a row of parallel slits. The slits are open between the first face and the second face and may extend either vertically or horizontally across each face of the baffle. Accordingly, there are either M rows or N columns of slits. The baffle is disposed in the second propagation path so that the second light beam illuminates the first face and passes through the slits to exit from the second face as a plurality of planar light beams along the second propagation path. The mirror array is disposed in a facing relationship to the second face of the baffle. Each row or column of the mirrors has an optically reflective surface in optical alignment with a respective one of the slits. Each mirror reflects a portion of the planar light beam incident thereon through the respective one of the slits to develop a plurality of pixel light beams exiting the apertures from the first face along the second propagation path.

Unique modulation television

A scene projector is calibrated by providing a look-up table for intensity adjustment values of each pixel of the displayed frame. The look-up table is formed by calculating a ratio of measured intensity of each pixel to the intensity of the pixel of minimum intensity when power and scene modulation controls are at maximum. Power modulator control response and scene modulator control response curves are generated, and a black body calibration is performed to define the relation between black body temperature, power modulator and scene modulator settings. Power modulator control settings are determined for each of a number of selected black body temperatures, and a scene modulator setting is determined that is required to obtain a proper black body temperature. These values are stored in a second table and combined with intensity value corrections from the intensity value table to modify image data.

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Torrance, CA, United States of America

Gregory Um