The Penn State Research Foundation

Gregory R Hayes

Randy S Haluck

James H Adair

Mary Frecker

Abraham Mathew

Eric Mockensturm

Rebecca Kirkpatrick

Chumpol Yuangyai

Harriet Black Nembhard

Nicholas Antolino

Christopher Muhlstein

Milton Aguirre

A polycrystalline mesoscale component, formed through a process including filing a mold cavity formed in a photoresist with a mold fill, is provided with an overall length L divided into multiple segments with a second segment extending from a first segment at a nonlinear angle. The first segment has a first segment height H1 and a first segment thickness T1, while the second segment has a second segment height H2 and a second segment thickness T2, with the lesser of H1 and H2 defining a minimum segment height Hmin and the lesser of T1 and T2 defining a minimum segment thickness Tmin. The resultant component has a ratio of L:Hmin:Tmin of 20-80:1:0.5-10 where Hmin is between 5 and 500 microns. In specific instances, the nonlinear angle is acute, the multiple segments are rectilinear in cross section, and a segment thickness has an edge resolution of between 0.1 and 2 microns.

Polycrystalline complex-shaped mesoscale components

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State College, PA, United States of America

Gregory R Hayes