Asm IP Holding B.v.

Gregory Michael Bartlett

John Tolle

Joe Margetis

Nupur Bhargava

Eric R Hill

Sam Kim

Xing Lin

Junwei Su

Alexandros Demos

Michael Sarin

Keith R Lawson

Mingyang Ma

Rafael Mendez

Andy Rosser

A gas injection system, a reactor system including the gas injection system, and methods of using the gas injection system and reactor system are disclosed. The gas injection system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas injection system coupled to a reaction chamber.

Multi-port gas injection system and reactor system including same

A gas distribution system is disclosed in order to obtain better film uniformity on a substrate in a cross-flow reactor. The better film uniformity may be achieved by an asymmetric bias on individual injection ports of the gas distribution system. The gas distribution may allow for varied tunability of the film properties.

Process for forming a film on a substrate using multi-port injection assemblies

Radial and thickness control via biased multi-port injection settings

A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.

Systems and methods for mass flow controller verification

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Phoenix, AZ, United States of America

Gregory Michael Bartlett