1. American Air Liquide, Inc. (7 from 336 patents)

2. Other (5 from 832,891 patents)

3. Air Liquide America, L.p. (2 from 73 patents)

4. L'air Liquide, Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude (1 from 1,435 patents)

5. L'air Liquide, Societe Anonyme a Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude (1 from 295 patents)

6. Air Liquide Electronics U.S. LP (1 from 37 patents)

1. 7906094 - Method for producing a high purity trisilane product from the pyrolysis of disilane

2. 7334708 - Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical

3. 7312165 - Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices

4. 7175696 - Method and apparatus for corrosive gas purification

5. 7141500 - Methods for forming aluminum containing films utilizing amino aluminum precursors

6. 6581649 - Methods and apparatus for delivering high purity liquids with low vapor pressure

7. 6543493 - Optical monitoring processes and apparatus for combined liquid level sensing and quality control

8. 6361750 - Systems for purification of boron trichloride

9. 6238636 - Process and systems for purification of boron trichloride

10. 5897847 - Method for extending the gas lifetime of excimer lasers

11. 5672827 - Method for measuring the flow rate of a species contained in an exhaust

12. 5063035 - Enhanced performance of alumina for the removal of low-level fluorine