Applied Materials, Inc.

Gregory L Kolte

Leonid Poslavsky

Nils Johansson

Paul E Luscher

Terry Lee Doyle

Manush Birang

A substrate processing system having a bi-directional interface and concomitant communication protocol to allow a controller to communicate with an external endpoint system is disclosed. More specifically, the substrate processing system comprises a controller and an endpoint detection system that are coupled together via a RS-232 interface. A SECS compliant communication protocol is employed to effect communication between the controller and endpoint detection system to increase wafer processing information exchange and data exchange.

Growing community of inventors

San Jose, CA, United States of America

Gregory L Kolte