J.a. Woollam Co.

University of Nebraska

Gregory K Pribil

Martin M Liphardt

John A Woollam

Craig M Herzinger

Blaine D Johs

James D Welch

Thomas E Tiwald

Ping He

Steven E Green

Tino Hofmann

Mathias M Schubert

Ronald A Synowicki

Stefan Schoeche

James N Hilfiker

Corey L Bungay

Sean R Knight

Philipp Kuehne

Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of use

An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.

Elliposometer system with polarization state generator and polarization state analyzer in environmental chamber

Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.

Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample

Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions.

Sample analysis methodology utilizing electromagnetic radiation

Systems and methodology for determining not only precise and repeatable results, but accurate values of the refractive index of solids, fluids and liquids.

Accurate determination of refractive indices of solid, fluid and liquid materials

A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.

Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access

Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing films, preferably using only A.C. Components of ellipsometric and intensity characterizing electromagnetic radiation which transmits through said substrate and enters a detector.

Growing community of inventors

Lincoln, NE, United States of America

Gregory K Pribil