University of Oregon

Gregory J Kearns

James E Hutchison

Silicon grids with electron-transparent SiOwindows for use as substrates for high-resolution transmission electron microscopy of chemically-modified SiOsurfaces are fabricated by forming an oxide layer on a silicon substrate. An aperture is defined in the silicon substrate by etching the substrate to the oxide layer. A single substrate can include a plurality of apertures that are in respective frame regions that are defined by one or more channels in the substrate. Structural or chemical functionalizations can be provided, and surface interactions observed via TEM.

Growing community of inventors

Foster City, CA, United States of America

Gregory J Kearns