Oxford Instruments Nanotechnology Tools Limited

Gregory Ian Chance

Brian Halsall

Andrew David York

A signal generating system comprises a signal generator () for generating an electrical signal at a predetermined frequency; an impedance matching circuit (), the electrical signal being supplied from the signal generator () via the impedance matching circuit () to a reactive load () in use; and an impedance matching control system () for detecting the electrical signal between the signal generator and the reactive load and for adjusting the impedance matching circuit () to achieve a predetermined condition. The impedance matching circuit control system () comprises a heterodyne circuit, and the system further comprises a heterodyne frequency generator () coupled to the signal generator () to generate a second, heterodyne frequency from the predetermined frequency from the signal generator. This second, heterodyne frequency is mixed with the detected signal to generate sum and difference signals. A filter () passes the difference signal and a processor (Magnitude control; Phase control;) responsive to the difference signal is used to adjust the impedance matching circuit () to achieve the predetermined condition.

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Gregory Ian Chance